International Standard Classification of Vacuum Levels
Vacuum levels are classified internationally based on the pressure range within a vacuum system. These categories help researchers, engineers, and manufacturers describe and compare different vacuum conditions in a consistent way. The most widely accepted classification divides vacuum into the following levels:
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Low Vacuum (Rough Vacuum)
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Pressure range: 100,000 Pa to 100 Pa
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Typical applications: vacuum packaging, basic laboratory work, simple industrial processes.
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Medium Vacuum
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Pressure range: 100 Pa to 0.1 Pa
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Typical applications: coating processes, some analytical instruments, and vacuum furnaces.
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High Vacuum
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Pressure range: 0.1 Pa to 10⁻⁵ Pa
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Typical applications: electron microscopy, mass spectrometry, and thin-film deposition.
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Ultra-High Vacuum (UHV)
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Pressure range: below 10⁻⁵ Pa to 10⁻¹⁰ Pa
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Typical applications: surface science experiments, particle accelerators, and semiconductor manufacturing.
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Extreme High Vacuum (XHV)
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Pressure range: below 10⁻¹⁰ Pa
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Typical applications: advanced physics research, space simulation chambers, and fundamental particle studies.
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These ranges are generally recognized by standards organizations such as the International Organization for Standardization (ISO) and are used across scientific and industrial fields. The classification helps determine which pumping systems, materials, and sealing methods are appropriate for achieving and maintaining a specific vacuum level.
