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Types of Dry Vacuum Pumps in Semiconductor Manufacturing: A Comparative Analysis
Dry vacuum pumps play a critical role in semiconductor manufacturing, where clean, oil-free environments are essential for high-precision processes. Over the past decade, advancements in mechanical design have led to the development of several dry vacuum pump types, each with unique advantages and limitations. This article explores the key categories of dry vacuum pumps used in semiconductor applications and provides guidance for selecting the most suitable design based on process requirements.1. IntroductionDry vacuum pumps are engineered to eliminate oil contamination, making them ideal for sensitive semiconductor processes. These pumps are broadly classified into two categories:multi-stage pumps(e.g., vane, claw, and combi-type) andsingle-stage pumps(e.g., screw-type).Multi-stage pumps rely on multiple vacuum chambers to compress gas incrementally, achieving high vacuum levels but requiring precise control of gaps and nitrogen dilution.Single-stage pumps, such as screw-type des
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Oil-Free Scroll Vacuum Pumps: Key Features and Industrial Applications
A clean vacuum environment has long been the gold standard for scientific research and industrial processes. Since the invention of vacuum technology, engineers and researchers have continuously sought methods to achieve contamination-free vacuum conditions. Today, a range of oil-free vacuum pumps exists, including condensation pumps, piston pumps, claw pumps, scroll pumps, and diaphragm pumps. Among these,oil-free scroll vacuum pumpsstand out for their unique advantages, making them a preferred choice in demanding applications.Key Features of Oil-Free Scroll Vacuum PumpsOil-Free and Frictionless OperationThe vacuum chamber operates without oil, ensuring non-contact operation between components. This eliminates mechanical wear and particulate contamination, providing an ultra-clean vacuum environment ideal for sensitive processes.High Pumping CapacityEquipped with dual scroll disks, these pumps offer double the pumping volume compared to single-stage models of the same d
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Key Considerations for Selecting a Vacuum Pump
When selecting a vacuum pump for industrial or scientific applications, it is critical to evaluate various technical, environmental, and economic factors. Below are essential guidelines to ensure optimal performance and compatibility with your specific requirements:1. Vibration and Environmental ImpactVibration Sensitivity: Assess whether the pump’s vibrations could interfere with the process or surrounding environment. If the application requires minimal vibration (e.g., precision manufacturing or laboratory settings), opt for oil-free or low-vibration pumps. Anti-vibration mounts or isolation systems can mitigate this issue in other cases.2. Gas Composition AnalysisGas Type and Properties: Identify the composition of the gas being extracted. Key factors include:Condensable Vapors: Gases like water vapor may require condensers to prevent clogging or damage.Particulate Matter: Dust or granular particles necessitate pre-filtration systems (e.g., dust collectors) to protect the pump.Corr
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Principles of Vacuum Pump Selection and Relevant Calculation Formulas
Before delving into the selection process for vacuum pumps, it's crucial to understand several fundamental concepts:Basic ConceptsVacuum Level: Represents the thinness of gas in a vacuum state, typically measured as vacuum level. The value read from a vacuum gauge is called vacuum level or gauge pressure. This indicates how much lower the system pressure is compared to atmospheric pressure (usually 101325 Pa). For instance, water ring vacuum pumps can achieve an ultimate absolute pressure of about 3300 Pa, whereas rotary vane pumps reach approximately 10 Pa.Ultimate Relative Pressure: Refers to the internal pressure difference relative to "atmospheric pressure". When using relative or gauge pressure, negative signs precede the values because the internal pressure is always lower than the external pressure.Ultimate Absolute Pressure: Compares the internal pressure with the theoretical vacuum (0 Pa). Due to technological limitations, achieving absolute vacuum is impossible; thus, the vac
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Vacuum Pump
