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Vacuum Generation Methods in Semiconductor Manufacturing Equipment
Introduction to VacuumVacuum refers to a space devoid of any matter or with extremely thin gas, typically defined as a state where the pressure is below one standard atmosphere (101325 Pa). It plays a pivotal role in semiconductor manufacturing by providing environments essential for various processes.Applications of Vacuum in Semiconductor EquipmentWafer/Reticle Handling: Utilizes vacuum to securely hold wafers and reticles during processing.Creating Reaction Conditions: Vacuum conditions are crucial for reducing impurities and ensuring high purity and structural integrity of materials used in semiconductor devices.Specific Applications:Crystal Growth Equipment: For instance, in the production of single-crystal silicon using the Czochralski method, a low-oxygen vacuum environment minimizes impurity incorporation, enhancing crystal quality.Compound Semiconductor Growth: Precise control over stoichiometry during growth under vacuum ensures optimal electrical performance of compound semi
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Several selection types of dry vacuum pumps used in semiconductor processes
In the past decade, several different types of dry vacuum pumps have been designed and produced, with significant differences in mechanical structure design.
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semiconductor
