BR VacuumOur main products include vacuum accessories, vacuum valves, non-standard vacuum customization, vacuum pumps, vacuum measurement, vacuum accessories, mass flow meters, and vacuum technology
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Areciprocating vacuum pump, also known as apiston-type vacuum pump, is one of the common devices used to obtain low vacuum. Compared with a rotary vane vacuum pump, it can be designed with a larger pumping speed. Compared with a liquid ring vacuum pump, it generally offers slightly higher efficiency. However, reciprocating pumps also have some drawbacks, including a more complex structure, larger size, and significant vibration during operation. In many applications, they can be replaced by liquid ring vacuum pumps.Structure and ComponentsA reciprocating vacuum pump typically consists of the following main parts:Cylinder– The chamber where the piston moves back and forth.Piston– Performs the reciprocating motion to create suction and compression.Crank and Connecting Rod Mechanism– Converts the rotary motion of the motor into the linear motion of the piston.Suction Valve– Allows gas to enter the cylinder from the vessel being evacuated.Exhaust Valve– Releases compressed gas from the cyl
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The concept of scroll technology dates back to 1905, when French engineer Léon Creux filed a U.S. patent for a reversible scroll expander. However, due to the limited machining and manufacturing capabilities of the time, the precision required for the scroll plates and their spiral profiles could not be achieved. As a result, scroll machinery could not be produced for several decades.In the 1970s, the situation changed dramatically. The energy crisis, combined with the emergence of high-precision CNC machine tools, created new opportunities for scroll technology. In 1973, the U.S. company Arthur D. Little (A.D.L.) released its first research report on a scroll-type nitrogen compressor, highlighting advantages that conventional compressors could not match. This marked the beginning of rapid large-scale development and commercialization of scroll compressors.Rise of Scroll Vacuum PumpsWith the rapid growth of industries such as semiconductors, new materials, and biopharmaceuticals—and th
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A turbomolecular pump is a type of vacuum pump that uses high-speed rotating blades (rotors) to transfer momentum to gas molecules, creating a directional flow and thus evacuating the chamber. The main advantages of turbomolecular pumps include rapid startup, resistance to various types of radiation, durability under atmospheric exposure, no gas storage or desorption effects, minimal or no oil vapor contamination, and the ability to achieve clean ultra-high vacuum. These pumps are widely used in high-energy accelerators, controlled thermonuclear fusion devices, heavy-ion accelerators, and the manufacturing of advanced electronic components.Development HistoryIn 1958, W. Becker of the Federal Republic of Germany introduced the first practically viable turbomolecular pump. Since then, various designs have emerged, with the most common being vertical and horizontal configurations.A turbomolecular pump generally consists of the pump body, a rotor with blades (dynamic blades), stator blades
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Dry vacuum pumps play a critical role in semiconductor manufacturing, where clean, oil-free environments are essential for high-precision processes. Over the past decade, advancements in mechanical design have led to the development of several dry vacuum pump types, each with unique advantages and limitations. This article explores the key categories of dry vacuum pumps used in semiconductor applications and provides guidance for selecting the most suitable design based on process requirements.1. IntroductionDry vacuum pumps are engineered to eliminate oil contamination, making them ideal for sensitive semiconductor processes. These pumps are broadly classified into two categories:multi-stage pumps(e.g., vane, claw, and combi-type) andsingle-stage pumps(e.g., screw-type).Multi-stage pumps rely on multiple vacuum chambers to compress gas incrementally, achieving high vacuum levels but requiring precise control of gaps and nitrogen dilution.Single-stage pumps, such as screw-type des
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A clean vacuum environment has long been the gold standard for scientific research and industrial processes. Since the invention of vacuum technology, engineers and researchers have continuously sought methods to achieve contamination-free vacuum conditions. Today, a range of oil-free vacuum pumps exists, including condensation pumps, piston pumps, claw pumps, scroll pumps, and diaphragm pumps. Among these,oil-free scroll vacuum pumpsstand out for their unique advantages, making them a preferred choice in demanding applications.Key Features of Oil-Free Scroll Vacuum PumpsOil-Free and Frictionless OperationThe vacuum chamber operates without oil, ensuring non-contact operation between components. This eliminates mechanical wear and particulate contamination, providing an ultra-clean vacuum environment ideal for sensitive processes.High Pumping CapacityEquipped with dual scroll disks, these pumps offer double the pumping volume compared to single-stage models of the same d
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When selecting a vacuum pump for industrial or scientific applications, it is critical to evaluate various technical, environmental, and economic factors. Below are essential guidelines to ensure optimal performance and compatibility with your specific requirements:1. Vibration and Environmental ImpactVibration Sensitivity: Assess whether the pump’s vibrations could interfere with the process or surrounding environment. If the application requires minimal vibration (e.g., precision manufacturing or laboratory settings), opt for oil-free or low-vibration pumps. Anti-vibration mounts or isolation systems can mitigate this issue in other cases.2. Gas Composition AnalysisGas Type and Properties: Identify the composition of the gas being extracted. Key factors include:Condensable Vapors: Gases like water vapor may require condensers to prevent clogging or damage.Particulate Matter: Dust or granular particles necessitate pre-filtration systems (e.g., dust collectors) to protect the pump.Corr
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